基于介质超表面的宽谱、大偏转角近红外光束偏转器

程宏; 李洪涛; 韩彦军; 孙长征; 郝智彪; 熊兵; 汪莱; 王健; 余佳东

doi:10.37188/OPE.20202809.1873

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基于介质超表面的宽谱、大偏转角近红外光束偏转器

现代应用光学 | 更新时间：2020-09-28

- 基于介质超表面的宽谱、大偏转角近红外光束偏转器
- Near-infrared beam deflector with broadband and large deflection angle based on dielectric metasurface
- 光学精密工程 2020年28卷第9期页码：1873-1880
- 作者机构：
  
  1.清华大学电子工程系北京信息科学与技术国家研究中心, 北京 100084
  2.浙江清华柔性电子技术研究院柔性智能光电子技术研究所, 浙江嘉兴 314006
  3.清华大学柔性电子技术研究中心, 北京 10084
- 作者简介：
  
  [ "程宏(1995-), 男, 河南信阳人, 硕士研究生, 2017年于西南交通大学获得学士学位, 主要从事超表面微纳光学结构的设计研究。E-mail:chengh17@mails.tsinghua.edu.cn" ]
  李洪涛(1981-), 男, 山东滨州人, 博士, 副研究员, 2003年于山东大学获得学士学位, 2008年于清华大学获得博士学位, 主要从事新型光学和光电子器件的研究。E-mail:lihongtao@tsinghua.eduLI Hong-tao, E-mail: lihongtao@tsinghua.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(61875104);国家自然科学基金资助项目(61975093);国家自然科学基金资助项目(61927811);国家自然科学基金资助项目(61822404);国家自然科学基金资助项目(61974080);国家自然科学基金资助项目(61904093);国家973重点基础研究发展计划资助项目(2015CB351900);国家重点研发计划资助项目(2016YFB0400903);国家重点研发计划资助项目(2018YFB2201701);清华大学自主科研计划资助项目(20193080036);北京信息科学与技术国家研究中心重点实验室资助项目(BNR2019ZS01005);中国博士后科学基金项目(2018M640129);中国博士后科学基金项目(2019T120090)
- DOI：10.37188/OPE.20202809.1873
  中图分类号： TB34;TN214
- 收稿日期：2020-03-13，
  
  修回日期：2020-04-03，
  
  录用日期：2020-4-3，
  
  纸质出版日期：2020-09-25
- 稿件说明：
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程宏, 李洪涛, 韩彦军, 等. 基于介质超表面的宽谱、大偏转角近红外光束偏转器[J]. 光学精密工程, 2020,28(9):1873-1880.

Hong CHENG, Hong-tao LI, Yan-jun HAN, et al. Near-infrared beam deflector with broadband and large deflection angle based on dielectric metasurface[J]. Optics and precision engineering, 2020, 28(9): 1873-1880.
程宏, 李洪涛, 韩彦军, 等. 基于介质超表面的宽谱、大偏转角近红外光束偏转器[J]. 光学精密工程, 2020,28(9):1873-1880. DOI： 10.37188/OPE.20202809.1873.

Hong CHENG, Hong-tao LI, Yan-jun HAN, et al. Near-infrared beam deflector with broadband and large deflection angle based on dielectric metasurface[J]. Optics and precision engineering, 2020, 28(9): 1873-1880. DOI： 10.37188/OPE.20202809.1873.

摘要

设计了一种适合集成的基于介质超表面的透射式光束偏转器，可在1 550 nm附近的红外波段实现大角度偏转，同时具有宽光谱、高效率的优势。根据广义斯涅尔定律设计并优化了光束偏转器的结构，由横截面为梯形的非晶硅纳米柱周期性排列在石英玻璃衬底上构成，相比于传统超表面采用多个纳米柱实现离散的相位梯度，梯形纳米柱形成的连续相位梯度可以获得更好的偏转特性。利用时域有限差分算法对光束偏转器的效率、偏转角、宽光谱和入射角度依赖性等性能进行了仿真分析，采用电子束光刻等工艺制备加工出上述器件并进行了测试。仿真结果表明：偏转器在1 350~1 650 nm波段均具备良好的偏转特性，平均透射率高于87%，平均偏转率为81%；器件在1 550 nm处实现了42.8°的大偏转角，透射率为84%，偏转率为80%，且允许入射角度在-10°~5°变化。实验测试结果表明：对于1 550 nm波长，光束偏转角度在41°附近，器件透射率约为76%，约35%的入射光偏转到目标角度。上述方案为近红外超表面器件的设计提供了新的思路，实现了效率、偏转角和适用波长的优化，透射式光路更加适合集成，应用潜力更大。

Abstract

For the infrared band near 1 550 nm

a transmissive beam deflector based on a dielectric metasurface is proposed. This deflector can achieve a large deflection angle together with a broadband spectrum and high efficiency. The structural design of the deflector is optimized according to the generalized Snell's law. It comprises amorphous silicon nanopillars with trapezoidal cross sections that are arranged periodically on a quartz glass substrate. The continuous phase gradient formed by the unique trapezoidal nanopillars in the proposed structure provides superior deflection characteristics compared with those provided by the discrete phase gradient formed by the discrete nanopillars utilized in traditional metasurfaces. The performance of the proposed device is simulated and analyzed with respect to efficiency

deflection angle

wavelength dependence

and incident angle dependence using the finite-difference time-domain method. The performance of this device is tested after its fabrication via processes such as electron beam lithography. The simulations indicate that this deflector realizes a deflection angle as large as 42.8° at 1 550 nm

as well as a transmissivity of 84%

a deflection efficiency of 80%

and an allowance of incident angle between -10° and 5°. Moreover

the deflector exhibits impressive deflection characteristics for wavelengths ranging from 1 350-1 650 nm

with an average transmissivity exceeding 87% and an average deflection efficiency of 81%. Experimental test results show that

at the wavelength of 1 550 nm

the beam deflection angle is nearly 41°

the device transmissivity is approximately 76%

and approximately 35% of the incident light is deflected to the target angle. The proposed device represents a new approach for the design of near-infrared metasurface devices and has application potential in numerous fields.

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Keywords

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