主轴动态回转误差测量技术

金岸; 缪寅宵; 刘冬冬; 林杰; 金鹏; 王雷

doi:10.37188/OPE.20202810.2227

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主轴动态回转误差测量技术

微纳技术与精密机械 | 更新时间：2020-11-16

- 主轴动态回转误差测量技术
- Research on spindle dynamic rotation-error-measurement technology
- 光学精密工程 2020年28卷第10期页码：2227-2243
- 作者机构：
  
  1.哈尔滨工业大学超精密光电仪器工程研究所, 黑龙江哈尔滨 150080
  2.超精密仪器技术及智能化工业和信息化部重点实验室(哈尔滨工业大学), 黑龙江哈尔滨 150080
  3.北京航天计量测试技术研究所, 北京 100076
  4.92493部队计量测试研究所, 辽宁葫芦岛 125000
- 作者简介：
  
  [ "金岸(1991-), 男, 江苏淮安人, 博士研究生, 2014年、2016年于哈尔滨工业大学分别获得学士、硕士学位, 主要从事计量校准仪器设计、高精度测量技术的研究。E-mail:ja_2010@163.com" ]
  金鹏(1972-), 男, 黑龙江哈尔滨人, 博士, 教授, 博士生导师, 2001年于哈尔滨工业大学获得博士学位, 主要从事基于微纳器件制备及其应用方面的研究。E-mail:p.jin@hit.edu.cn JIN Peng, E-mail:p.jin@hit.edu.cn
- 基金信息：
  
  国家重点研发计划资助项目(2016YFF0200700)
- DOI：10.37188/OPE.20202810.2227
  中图分类号： TB921;TH711
- 收稿日期：2020-01-07，
  
  修回日期：2020-02-09，
  
  录用日期：2020-2-9，
  
  纸质出版日期：2020-10-25
- 稿件说明：
移动端阅览
金岸, 缪寅宵, 刘冬冬, 等. 主轴动态回转误差测量技术[J]. 光学精密工程, 2020,28(10):2227-2243.

An JIN, Yin-xiao MIAO, Dong-dong LIU, et al. Research on spindle dynamic rotation-error-measurement technology[J]. Optics and precision engineering, 2020, 28(10): 2227-2243.
金岸, 缪寅宵, 刘冬冬, 等. 主轴动态回转误差测量技术[J]. 光学精密工程, 2020,28(10):2227-2243. DOI： 10.37188/OPE.20202810.2227.

An JIN, Yin-xiao MIAO, Dong-dong LIU, et al. Research on spindle dynamic rotation-error-measurement technology[J]. Optics and precision engineering, 2020, 28(10): 2227-2243. DOI： 10.37188/OPE.20202810.2227.

摘要

高速电主轴是一种将传统机械主轴中主轴电动机和机床主轴合而为一的新式主轴，因具有高速高精度的优点被大量应用于高性能加工中心。高速电主轴的动态回转特性在很大程度上决定了加工精度，是影响加工中心综合性能的重要因素。主轴运动误差测量方法大致可分为基于位移传感的主轴回转误差测量和基于光学手段的主轴回转误差测量。两类测量手段都是通过测量主轴回转一定角度的位移变化量来解析出主轴的径向回转误差，这两类测量方法在主轴低速运转时具有很好的测量效果。当高速电主轴处于高速工作状态时，这两类测量方法的测量效果将受到传感器件采样频率的限制。本文在总结现有主轴回转误差测量的基础上，提出了一种基于靶标轨迹追踪的主轴动态回转误差测量方法，对现有技术进行了总结，并对未来的发展趋势进行了展望。

Abstract

High-speed electric spindle is a novel spindle that combines the drive and transmission units of the conventional spindle. The high-speed electric spindle is widely used in high-performance machining centers because of its high speed and high precision. The dynamic rotation characteristics of the spindle greatly determine the machining accuracy of the machining center; thus

it is an important factor that affects the overall performance of the machining center. The research is roughly divided into two types

namely

spindle rotation-error measurement based on displacement sensing and that based on optical methods. These measurement methods aim to determine the radial rotation error of the spindle by measuring the displacement change inthe spindle at a certain angle. These two measurementmethods exhibitgood measurement performancewhen the spindle is running at a low speed. However

when the spindle is operating at a high speed

measurement becomes difficult because of the limitation in the sampling frequency. According to the summary of the methods thatmeasure the spindle rotation error

we propose a measurement method for spindle dynamic rotation error based on target trajectory tracking. Finally

we summarize the existing technology and discuss future research prospects.

关键词

Keywords

references

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