1.南京理工大学 机械工程学院,江苏 南京 210094
2.吉林大学 机械与航空航天工程学院,吉林 长春 130025
3.上海交通大学 机械与动力工程学院,上海 200240
[ "朱志远(1997-),男,安徽合肥人,硕士研究生,2020年于安徽理工大学获得学士学位,主要从事智能微纳驱动控制的研究。E-mail:zy.zhu@njust.edu.cn" ]
[ "朱志伟(1988-),男,江苏南通人,教授,博士生导师,2010年、2013年于吉林大学分别获得学士和硕士学位,2016年于香港理工大学获得博士学位,主要研究方向为先进光学制造与检测技术、微纳驱动与控制技术。E-mail: zw.zhu@njust.edu.cn" ]
扫 描 看 全 文
朱志远, 朱紫辉, 周晓勤, 等. 三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J]. 光学精密工程, 2023,31(15):2236-2247.
ZHU Zhiyuan, ZHU Zihui, ZHOU Xiaoqin, et al. Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J]. Optics and Precision Engineering, 2023,31(15):2236-2247.
朱志远, 朱紫辉, 周晓勤, 等. 三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J]. 光学精密工程, 2023,31(15):2236-2247. DOI: 10.37188/OPE.20233115.2236.
ZHU Zhiyuan, ZHU Zihui, ZHOU Xiaoqin, et al. Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J]. Optics and Precision Engineering, 2023,31(15):2236-2247. DOI: 10.37188/OPE.20233115.2236.
三轴快速刀具伺服(Fast Tool Servo, FTS)具有更高的刀具空间运动柔性,逐渐用于复杂光学曲面和微纳结构表面的切削加工。针对所研制电磁-压电混合驱动三轴FTS存在的轴间耦合、高频谐振和迟滞非线性等因素对轨迹跟踪性能的影响,研究综合补偿策略实现三轴空间轨迹的高性能跟踪控制。以陷波滤波器抑制系统高频谐振,以前馈解耦补偿弱化平面轴间耦合;针对法应力电磁驱动和压电驱动的迟滞非线性,提出以线性动力学模型级联Prandtl-Ishlinskii模型描述各轴的动态迟滞特性,并构建无需直接求逆的迟滞前馈补偿模型,实现系统的迟滞非线性补偿。谐波扫频测试结果表明:所采用的陷波滤波器可以很好地消除高频谐振,前馈解耦补偿可将平面,XY,轴间的耦合幅值降低约14 dB。宽频域内迟滞建模结果表明:平面,XY,轴和,Z,轴的动态迟滞建模误差分别小于±2.2%和±1.8%。以PID为主控制器,对宽频谐波(10~100 Hz)的跟踪结果表明:采用综合补偿策略获得各轴的最大跟踪误差约为仅采用逆动力学前馈补偿的25%~50%,进一步对空间螺旋球面轨迹进行了跟踪测试,证明了所构建的综合补偿控制策略的有效性。
Recently, tri-axial fast tool servos, which offer higher cutting flexibility, are being applied to the machining of complex optical surfaces. However, the trajectory tracking performance is significantly affected by various factors, including cross-coupling, high-frequency resonance, and hysteresis nonlinearity. To address these issues, a comprehensive compensation strategy was proposed to achieve high-performance tracking control of spatial trajectories. Specifically, a notch filter was introduced to suppress high-frequency resonance, and feedforward decoupling compensation was employed to weaken the ,XY, planar cross-coupling. Furthermore, a Prandtl-Ishlinskii model was cascaded with a dynamic model to describe the dynamic hysteresis for each axis, and a hysteresis feedforward compensation model was constructed without solving the inversion of the hysteresis model. The sweep test results show that the adopted notch filter can eliminate the high-frequency resonance effectively. The feedforward decoupling compensation further reduces the ,XY, planar cross-coupling by approximately 14 dB. The wideband hysteresis modeling results indicate that the dynamic hysteresis modeling errors of the ,XY, plane actuation and ,Z,-axial actuation are less than ±2.2% and ±1.8%, respectively. With proportional-integral-derivative control used for the main controller, the wideband tracking (10-100 Hz) shows that the maximum tracking error for each axis using the comprehensive compensation strategy is only 25% to 50% that when only inverse dynamic feedforward compensation is used. Furthermore, the tracking results for the spatial trajectory demonstrate the effectiveness of the proposed comprehensive compensation control strategy.
快速刀具伺服轨迹跟踪控制陷波滤波器前馈解耦补偿动态迟滞模型
fast tool servotrajectory tracking controlnotch filterfeed-forward decoupling compensationdynamic hysteresis model
吴庆玲. 光学自由曲面快速刀具伺服车削误差的补偿[J]. 光学 精密工程, 2015, 23(9): 2620-2626. doi: 10.3788/OPE.20152309.2620http://dx.doi.org/10.3788/OPE.20152309.2620
WU Q L. Error compensation of optical freeform surfaces in fast tool servo diamond turning[J]. Opt. Precision Eng., 2015, 23(9):2620-2626.(in Chinese). doi: 10.3788/OPE.20152309.2620http://dx.doi.org/10.3788/OPE.20152309.2620
CHEN Y L, LI Z W, CHEN F W, et al. Development of an optimized three-axis fast tool servo for ultraprecision cutting[J]. IEEE/ASME Transactions on Mechatronics, 2022, 27(5): 3244-3254. doi: 10.1109/tmech.2021.3109696http://dx.doi.org/10.1109/tmech.2021.3109696
CHEN L, NIU Y H, YANG X, et al. A novel compliant nanopositioning stage driven by a normal-stressed electromagnetic actuator[J]. IEEE Transactions on Automation Science and Engineering, 2022, 19(4): 3039-3048. doi: 10.1109/tase.2021.3105683http://dx.doi.org/10.1109/tase.2021.3105683
闫鹏, 李金银. 压电陶瓷驱动的长行程快刀伺服机构设计[J]. 光学 精密工程, 2020, 28(2):390-397.
YAN P, LI J Y. Design of piezo-actuated long-stroke fast tool servo mechanism[J]. Opt. Precision Eng., 2020, 28(2):390-397.(in Chinese)
TAO Y, LI Z, HU P, et al.. High-accurate cutting forces estimation by machine learning with voice coil motor-driven fast tool servo for micro/nano cutting [J]. Precision Engineering, 2023, 79: 291-299. doi: 10.1016/j.precisioneng.2022.11.014http://dx.doi.org/10.1016/j.precisioneng.2022.11.014
HUANG W W, LI L, ZHU Z, et al. Modeling, design and control of normal-stressed electromagnetic actuated fast tool servos[J]. Mechanical Systems and Signal Processing, 2022, 178: 109304. doi: 10.1016/j.ymssp.2022.109304http://dx.doi.org/10.1016/j.ymssp.2022.109304
LU X D, TRUMPER D L. Ultrafast tool servos for diamond turning[J]. CIRP Annals, 2005, 54(1): 383-388. doi: 10.1016/s0007-8506(07)60128-0http://dx.doi.org/10.1016/s0007-8506(07)60128-0
WU D, CHEN K. Frequency-domain analysis of nonlinear active disturbance rejection control via the describing function method[J]. IEEE Transactions on Industrial Electronics, 2013, 60(9): 3906-3914. doi: 10.1109/tie.2012.2203777http://dx.doi.org/10.1109/tie.2012.2203777
房丰洲, 陈晓菲, 张效栋, 等. 基于自抗扰控制算法的麦克斯韦快刀伺服控制系统[J]. 纳米技术与精密工程, 2017, 15(5):335-341. doi: 10.13494/j.npe.20160094http://dx.doi.org/10.13494/j.npe.20160094
FANG F ZH, CHEN X F, ZHANG X D, et al. Development of fast tool servo control system based on maxwell normal force using ADRC algorithm[J]. Nanotechnology and Precision Engineering, 2017, 15(5):335-341.(in Chinese). doi: 10.13494/j.npe.20160094http://dx.doi.org/10.13494/j.npe.20160094
夏薇, 朱紫辉, 陈栎, 等. Maxwell电磁力驱动快速刀具伺服系统轨迹跟踪控制[J]. 机械工程学报, 2022, 58(3): 259-265. doi: 10.3901/jme.2022.03.259http://dx.doi.org/10.3901/jme.2022.03.259
XIA W, ZHU Z H, CHEN L, et al. Trajectory tracking control of a fast tool servo system driven by maxwell electromagnetic force[J]. Journal of Mechanical Engineering, 2022, 58(3): 259-265.(in Chinese). doi: 10.3901/jme.2022.03.259http://dx.doi.org/10.3901/jme.2022.03.259
ZHANG X, LAI L, ZHANG L, et al. Hysteresis and magnetic flux leakage of long stroke micro/nanopositioning electromagnetic actuator based on Maxwell normal stress[J]. Precision Engineering, 2022, 75: 1-11. doi: 10.1016/j.precisioneng.2022.01.003http://dx.doi.org/10.1016/j.precisioneng.2022.01.003
ZHU Z W, TO S, ZHU W L, et al. Optimum design of a piezo-actuated triaxial compliant mechanism for nanocutting[J]. IEEE Transactions on Industrial Electronics, 2018, 65(8): 6362-6371. doi: 10.1109/tie.2017.2787592http://dx.doi.org/10.1109/tie.2017.2787592
LI H, TANG H, LI J, et al. Design, fabrication, and testing of a 3-DOF piezo fast tool servo for microstructure machining[J]. Precision Engineering, 2021, 72: 756-768. doi: 10.1016/j.precisioneng.2021.07.015http://dx.doi.org/10.1016/j.precisioneng.2021.07.015
ZHU Z H, CHEN L, NIU Y H, et al. Triaxial fast tool servo using hybrid electromagnetic–piezoelectric actuation for diamond turning[J]. IEEE Transactions on Industrial Electronics, 2022, 69(2): 1728-1738. doi: 10.1109/tie.2021.3060635http://dx.doi.org/10.1109/tie.2021.3060635
YAMAGUCHI T, HIRATA M, PANG C K. High-Speed Precision Motion Control [M]. Boco Raton: CRC Press, 2011
门延武, 张辉, 姜文雪, 等. CMP多区压力定量解耦协同控制[J]. 清华大学学报(自然科学版), 2015, 55(7): 750-755.
MEN Y W, ZHANG H, JIANG W X, et al. Quantitative decoupling cooperative control of CMP multi-zone pressure[J]. Journal of Tsinghua University (Science and Technology), 2015, 55(7): 750-755.(in Chinese)
GU G Y, ZHU L M, SU C Y, et al. Modeling and control of piezo-actuated nanopositioning stages: a survey[J]. IEEE Transactions on Automation Science and Engineering, 2016, 13(1): 313-332. doi: 10.1109/tase.2014.2352364http://dx.doi.org/10.1109/tase.2014.2352364
杨斌堂, 赵寅, 彭志科, 等. 基于Prandtl-Ishlinskii模型的超磁致伸缩驱动器实时磁滞补偿控制[J]. 光学 精密工程, 2013, 21(1):124-130. doi: 10.3788/ope.20132101.0124http://dx.doi.org/10.3788/ope.20132101.0124
YANG B T, ZHAO Y, PENG ZH K, et al. Real-time compensation control of hysteresis based on Prandtl-Ishlinskii operator for GMA[J]. Opt. Precision Eng., 2013, 21(1):124-130.(in Chinese). doi: 10.3788/ope.20132101.0124http://dx.doi.org/10.3788/ope.20132101.0124
RAKOTONDRABE M. Classical Prandtl-Ishlinskii modeling and inverse multiplicative structure to compensate hysteresis in piezoactuators[C]. 2012 American Control Conference (ACC). June 27-29, 2012. Montreal, QC. IEEE, 2012: 1646-1651.
RAKOTONDRABE M. Bouc-Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators[J]. IEEE Transactions on Automation Science and Engineering, 2011, 8(2): 428-431. doi: 10.1109/tase.2010.2081979http://dx.doi.org/10.1109/tase.2010.2081979
0
浏览量
53
下载量
0
CSCD
关联资源
相关文章
相关作者
相关机构