平转动大磨头加工大口径非圆形球面的粗磨试验

罗霄; 郑立功; 张学军

doi:10.3788/OPE.20111906.1199

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平转动大磨头加工大口径非圆形球面的粗磨试验

现代应用光学 | 更新时间：2020-08-12

- 平转动大磨头加工大口径非圆形球面的粗磨试验
- Grinding experiments of large non-circular spheres by large laps with orbital tool motion
- 光学精密工程 2011年19卷第6期页码：1199-1206
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助重点项目(No.61036015)()
- DOI：10.3788/OPE.20111906.1199
  中图分类号： TQ171.684
- 收稿日期：2010-09-13，
  
  修回日期：2010-10-27，
  
  网络出版日期：2011-06-25，
  
  纸质出版日期：2011-06-25
- 稿件说明：
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罗霄, 郑立功, 张学军. 平转动大磨头加工大口径非圆形球面的粗磨试验[J]. 光学精密工程, 2011,19(6): 1199-1206

LUO Xiao, ZHENG Li-gong, ZHANG Xue-jun. Grinding experiments of large non-circular spheres by large laps with orbital tool motion[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1199-1206
罗霄, 郑立功, 张学军. 平转动大磨头加工大口径非圆形球面的粗磨试验[J]. 光学精密工程, 2011,19(6): 1199-1206 DOI： 10.3788/OPE.20111906.1199.

LUO Xiao, ZHENG Li-gong, ZHANG Xue-jun. Grinding experiments of large non-circular spheres by large laps with orbital tool motion[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1199-1206 DOI： 10.3788/OPE.20111906.1199.

摘要

提出了用于大口径非圆形球面反射镜研磨和抛光的平转动大磨头加工技术

该技术基于平转动小磨头计算机控制光学表面成形技术

通过增大磨头口径的方式来提高其材料去除效率。针对大口径磨头比较突出的边缘效应

通过低阶拟合以及高阶补偿相结合的方法

在虚拟加工算法中引入边缘效应的影响

保证材料去除效率提高的同时具有一定的面形收敛率

从而有效地缩短加工周期。最后对一块1 100 mm800 mm的体育场形SiC坯料进行了加工试验

共进行22轮加工

总加工时间约51 h

面形从122 m(PV)收敛至5.9 m(PV)。与传统小磨头加工技术相比

效率提高了1倍以上

实现了大口径非圆形球面在粗磨阶段的高效去除。

Abstract

A large tools with orbital tool motion was adopted to upgrade the processing efficiency of the small tools with orbital tool motion based on Computer Controlled Optical Surfacing(CCOS) technology by enlarging the lap size. The edge effect that is common for large laps was simulated and compensated by combination of the first order approximation and the high order compensation to improve the convergence rate and to maintain better remoral efficiency.Therefore

the processing periods were shortened effectively. A round square of 1 100 mm800 mm SiC mirror was grinded with this method. After 22 runs of 55 hours in all processing

the overall surface error is 122 m PV before and 5.9m PV after the process.Comparing with that of previous small lap technology

the efficiency is im-proved by a factor of at least 2.

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references

STAHL H P. JWST mirror technology development results [J]. SPIE, 2007, 6671.[2] BRUNE E, DIERICKX P, GILMOZZI R, et al.. Progress of ESO's 100-m OWL optical telescope design [J]. SPIE,2004,5382:159-168.[3] HAGOPIAN J, BUDINOFF J, DEAN B, et al.. Fabrication and test of spherical primary optical telescope (SPOT) segments, in optical fabrication and testing [J]. OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWF2P. [4] SEMENOV A P, ABDUILADYROV M A, IGNATOY A N. Fabrication of blanks, figuring, polishing, and testing of segmented astronomic mirrors for SALT and LAMOST projects[J]. SPIE, 2004,5494:31-38.[5] 王权陡,余景池,张学军,等. 数控抛光中不同运动方式下小抛光盘抛光特性之比较[J]. 光学精密工程,1999,7(5):73-79. WANG Q D, YU J CH, ZHANG X J, et al.. Polishing performance comparison of small polishing pad worked in different motion model in computer controlled optical polishing [J]. Opt. Precision Eng.,1999,7(5):73-79. (in Chinese)[6] 郑立功,张学军,张峰. 矩形离轴非球面反射镜的数控加工[J]. 光学精密工程,2004,12(1):113-117. ZHENG L G, ZHANG X J, ZHANG F. NC surfacing of two off-axis aspheric mirrors [J]. Opt. Precision Eng., 2004,12(1):113-117. (in Chinese).[7] JONES R A. Computer controlled optical surfacing with orbital tool motion [J]. Opt. Eng., 1986,25:785-790.[8] PRESTION F. The theory and design of plate glass polishing machines[J]. J. Soc. Glass Tech., 1927, IX:14-256.[9] ROBLEDO S. Edge effects with the Preston equation for a circular tool and work piece [J]. Appl. Op., 2004,43:1250-1254.[10] KIM D W, PARK W H, KIM S W,et al.. Parametric modeling of edge effects for polishing tool influence functions [J]. Opt. Express, 2009,17(7):5656-5665.

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