压电陶瓷执行器的动态模型辨识与控制

陈辉; 谭永红; 周杏鹏; 张亚红; 董瑞丽

doi:10.3788/OPE.20122001.0088

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压电陶瓷执行器的动态模型辨识与控制

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电陶瓷执行器的动态模型辨识与控制
- Identification and control of dynamic modeling for piezoceramic actuator
- 光学精密工程 2012年20卷第1期页码：88-95
- 作者机构：
  
  1. 东南大学自动化学院,江苏南京,210096
  2. 桂林电子科技大学电子工程与自动化学院,广西桂林,541004
  3. 上海师范大学信息与机电工程学院上海,200234
  4. 桂林航天工业高等专科学校信息工程系,广西桂林,541004
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60971004)();上海市科委重点基金资助项目();(No.09220503000,10JC1412200)();上海市自然科学基金
- DOI：10.3788/OPE.20122001.0088
  中图分类号： TP273.1;TN384
- 收稿日期：2011-08-05，
  
  修回日期：2011-09-28，
  
  网络出版日期：2012-01-25，
  
  纸质出版日期：2012-01-25
- 稿件说明：
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陈辉, 谭永红, 周杏鹏, 张亚红, 董瑞丽. 压电陶瓷执行器的动态模型辨识与控制[J]. 光学精密工程, 2012,20(1): 88-95

CHEN Hui, TAN Yong-hong, ZHOU Xing-peng, ZHANG Ya-hong, DONG Rui-li. Identification and control of dynamic modeling for piezoceramic actuator[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 88-95
陈辉, 谭永红, 周杏鹏, 张亚红, 董瑞丽. 压电陶瓷执行器的动态模型辨识与控制[J]. 光学精密工程, 2012,20(1): 88-95 DOI： 10.3788/OPE.20122001.0088.

CHEN Hui, TAN Yong-hong, ZHOU Xing-peng, ZHANG Ya-hong, DONG Rui-li. Identification and control of dynamic modeling for piezoceramic actuator[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 88-95 DOI： 10.3788/OPE.20122001.0088.

摘要

为了提高精密定位系统中压电陶瓷的控制精度

研究了压电执行器的动态模型及逆模型。根据Weierstrass第一逼近定理

提出了以多项式函数逼近Duhem模型中的分段连续函数

()和

()

并应用递推最小二乘算法辨识Duhem模型的参数及

()和

()的多项式系数

建立了压电陶瓷执行器的非线性参数化动态模型。利用辨识结果建立压电陶瓷执行器的动态逆模型

避免对压电陶瓷执行器进行复杂的模型求逆;介绍了通过逆补偿和PID复合控制对压电陶瓷系统进行的控制。实验结果表明:仅通过逆补偿

可在0~200 m使得控制绝对误差小于0.8 m;在前馈逆补偿和PID环控制下

绝对误差可小于40 nm

结果验证了算法的有效性。该算法结构简单

适应性强

便于工程实现。

Abstract

The dynamic model and inverse model of a piezoceramic actuator were proposed to improve its control precision in a precision position system. According to the Weierstrass approximation theorem

the polynomials

() and

() in the Duhem function was developed

and the dynamic modeling of nonlinear parameters of the piezoceramic actuator was given by using recursive least squares to identify the model parameters and polynomial coefficients in the Duhem model. Then

an inverse dynamic modeling of the piezoceramic actuator was established based on identified results to simplify the unknown parameter computation process greatly. Finally

the dynamic inverse compensation was incorporated in a closed-loop PID controller to control the piezoceramic actuator. Experimental results indicate that the maximum absolute error with the inverse compensation is less than 0.8 m and that with the inverse compensation and PID is less than 40 nm in an amplitude range of 200 m. The experimental result shows that the proposed identification scheme has improved the nonlinear characteristic of the piezoceramic actuator effectively.

关键词

Keywords

references

BANKS H T, SMITH R C. Hysteresis modeling in smart material systems[J]. Appl. Mech. Eng., 2000(5):31-45.[2] TAN X, BARAS J S. Modeling and control of hysteresis in magnetostrictive actuators[J].Automatica, 2004,40(9):1469-1480.[3] MAYEYERGOYZ I D. Mathematical model of hysteresis [J].IEEE Transa. on Magnet., 1986,22(5):603-608.[4] 刘向东,刘宇,李黎. 一种新广义Preisach迟滞模型及其神经网络辨识 [J].北京理工大学学报,2007,27(2):135-138. LIU X D,LIU Y,LI L.A new kind of generalized Preisach hysteresis model and its identification based on the neural network[J]. Transactions of Beijing Institute of Technology, 2007,27(2):135-138.(in Chinese)[5] JILES D, LATHERTON D. Ferromagnteic hysteresis[J]. IEEE Trans. Magnet., 1983,19(5):2183-2185.[6] GOLDFARB M, CELANOVIC N. A lumped parameter electromechanical model for describing the nonlinear behavior of piezoelectric actuators[J].ASME J. Dynamic Syst. Measure. Control, 1997,119(3):479-485.[7] WEN Y K. Method for random vibration of hysteretic system[J]. ASCE J. Eng. Mech., 1976,120:2299-2325.[8] ANG W T, GARM'ON F A. Modeling rate-dependent hysteresis in piezoelectric actuators .Proceedings of the 2003 IEEE/RSJ Intl. Confernece on Intelligent Robots and Systems, Las Vegas, NV,October, 2003.[9] DONG R, TAN Y, CHEN H, et al.. A neural networks based model for rate-dependent hysteresis for piezoceramic actuators[J].Sensors and Actuators A: Physical, 2008,143(2):370-376.[10] DONG R, TAN Y. Modeling hysteresis in piezoceramic actuators using modified Prandtl-Ishlinskii model[J]. Physica B, 2009,404(8-11):1336-1342.[11] OH J H, DENNIS S. Bemstein identification of rate-dependent hysteresis using the SE milinear Duhem model . Proceeding of the American Control Conference,2004:4776-4781.[12] BANKS H T, SMITH R C. Hysteresis modeling in smart material systems[J]. Appl. Mech. Eng., 2000,5:31-45.[13] OH J, BERNSTEIN D S. SE milinear Duhem model for rate-independent and rate-dependent hysteresis[J]. IEEE Trans. Autom. Control, 2005,50(5):631-645.[14] SU C Y, STEPANENKO Y, SVOBODA J, et al.. Robust adaptive control of a class of nonlinear systems with unknown backlash-like hysteresis[J]. IEEE Trans. Automat. Control, 2000,45(12):2427-2432.[15] FENG Y, RABBATH CA, CHAI T, et al.. Robust adaptive control of systems with hysteretic nonlinearities:a Duhem hysteresis modelling approach [J].IEEE Africom, 2009:1-6.[16] HU H. Compensation of hysteresis in piezoceramic actuators and control of nanopositioning system .Canada: P.H.D Thesis of University of Toronto, 2003.[17] 王生怀,陈育荣,王淑珍,等. 三维精密位移系统的设计 [J].光学精密工程,2010,18(1):175-182. WANG SH H,CHEN Y R,WANG SH ZH,et al..Design of 3D precision displacement system[J].Opt. Precision Eng.,2010,18(1):175-182.(in Chinese)[18] ZHANG X L, TAN Y H, SU M Y. Modeling of hysteresis in piezoelectric actuators using neural net-works[J].Mechanical and Signal Processiong, 2009,23(8):2699-2711.[19] 张栋,张承进,魏强 . 压电微动工作台的动态迟滞模型 [J].光学精密工程,2009,17(3):551-556. ZHANG D,ZHANG CH J,WEI Q.Dynamic hystersis model of piezopositioning stage[J].Opt.Precision Eng.,2009,17(3):551-556.(in Chinese)[20] 孙立宁 , 孙绍云 , 曲东升 , 等 . 基于PZT的微驱动定位系统及控制方法的研究 [J]. 光学精密工程 ,2004,12(1):55-59. SUN L N ,SUN SH Y, QU D SH, et al.. Micro-drive positioning system based on PZT and its control[J]. Opt.Precision Eng., 2004 , 12 (1):55-59. (in Chinese)[21] 王岳宇 , 赵学增. 补偿压电陶瓷迟滞与蠕变的逆控制算法 [J]. 光学精密工程 ,2006,14(6):1032-1040. WANG Y Y, ZHAO X Z.Inverse control algorithm to compensate the hysteresis and creep effect of piezoceramic[J]. Opt. Precision Eng., 2006,14(6):1032-1040.(in Chinese)[22] 孙永生. 函数逼近论[M]. 北京:北京师范大学出版社 ,1989. SUN Y SH.Approximation of Functions[M].Beijing:Publishing House of Beijing Normal University, 1989.[23] LJUNG V L. System Identification Theory for the User[M]. Second Edition. Prentice Hall,1999.[24] COLEMAN B D, HODGDON M L. A constitutive relation for rate-independent hysteresis in ferromagnetically soft materials[J]. International J. Eng. Sci., 1986,24:897-919.

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