超薄硅衬底氮化铝Lamb波压电谐振器

李传宇; 孔慧; 唐玉国; 张芷齐; 郭振; 张威; 周连群

doi:10.3788/OPE.20182602.0371

您当前的位置：

首页 >

文章列表页 >

超薄硅衬底氮化铝Lamb波压电谐振器

微纳技术与精密机械 | 更新时间：2020-07-05

- 超薄硅衬底氮化铝Lamb波压电谐振器
- Aluminum nitride Lamb wave piezoelectric resonators based on ultrathin silicon substrates
- 光学精密工程 2018年26卷第2期页码：371-379
- 作者机构：
  
  1.中国科学院苏州生物医学工程技术研究所, 江苏苏州 215163
  2.中国科学院大学, 北京 100049
  3.中国科学技术大学, 安徽合肥 230026
- 作者简介：
  
  [ "李传宇(1986-), 男, 山东曲阜人, 博士研究生, 助理研究员, 2008年、2011年于山东大学分别获得学士、硕士学位, 主要从事MEMS压电声波传感器方面的研究。E-mail:lichy@sibet.ac.cn" ]
  [ "唐玉国 (1967-)，男，吉林蛟河人，博士生导师，973计划首席科学家，中科院特聘研究员，1995年于中国科技大学获得博士学位，主要从事医用光学、应用光学、光谱学及相关仪器研发等研究工作。E-mail: tangyg@sibet.ac.cn" ]
- 基金信息：
  
  国家863高技术研究发展计划资助项目(2015AA042603)
- DOI：10.3788/OPE.20182602.0371
  中图分类号： TP212.1;TP212.9
- 收稿日期：2017-05-27，
  
  录用日期：2017-7-23，
  
  纸质出版日期：2018-02-25
- 稿件说明：
移动端阅览
李传宇, 孔慧, 唐玉国, 等. 超薄硅衬底氮化铝Lamb波压电谐振器[J]. 光学精密工程, 2018,26(2):371-379.

Chuan-yu LI, Hui KONG, Yu-guo TANG, et al. Aluminum nitride Lamb wave piezoelectric resonators based on ultrathin silicon substrates[J]. Optics and precision engineering, 2018, 26(2): 371-379.
李传宇, 孔慧, 唐玉国, 等. 超薄硅衬底氮化铝Lamb波压电谐振器[J]. 光学精密工程, 2018,26(2):371-379. DOI： 10.3788/OPE.20182602.0371.

Chuan-yu LI, Hui KONG, Yu-guo TANG, et al. Aluminum nitride Lamb wave piezoelectric resonators based on ultrathin silicon substrates[J]. Optics and precision engineering, 2018, 26(2): 371-379. DOI： 10.3788/OPE.20182602.0371.

摘要

针对Lamb波压电声波传感器高品质因数（Q值）、低检测极限（LOD）和易集成的性能要求，本文基于SOI（Silicon-on-insulator）硅片，通过底层硅（Handling layer）干法刻蚀和中间层（Boxing layer）自截止的方法实现2

m超薄均一的硅衬底结构，然后沉积2

m厚具备高C轴择优取向的氮化铝（AlN）压电薄膜。传感器薄膜区域外设置双端增强反射栅结构用于提高Q值，从而有效降低器件的检测极限，并通过微量水分测试验证性能。该谐振器零阶反对称模式（A

）和零阶对称模式（S

）的谐振状态的实测结果和COMSOL二维模型仿真结果一致，所制作的Lamb波谐振器A

模式的主峰Q值为703，S

模式的主峰Q值为403。微量水分测试S

模式的检测极限优于A

模式，最低检测极限值为0.06% RH。结果表明，氮化铝超薄硅衬底Lamb波压电谐振器能够实现微量水分等高精度检测。

Abstract

In order to achieve the performance requirements of piezoelectric acoustic Lame wave sensor with high quality factor (Q factor)

low limit of detection (LOD) and easy integration

a method was presented in the paper. First

an ultrathin and uniform 2

m-thick silicon substrate was obtained by dry etching of handling silicon layer and automatic stopping of boxing layer based on SOI (Silicon-on-insulator) wafer

and then a 2

m-thick Aluminum Nitride (AlN) piezoelectric thin film with high C axis oriented was deposited. High Q factor could be obtained by the double end reflectors outside the membrane. The LOD could be effectively reduced by using the resonator

and could be verified by the application of trace moisture detection. The experimental results of the lowest anti-symmetric mode (A

) and symmetric mode (S

) were consistent with the simulation results obtained by using software CMOSOL. The prominent peak value of Q factor of the resonator for A

mode was 703

and S

was 403. The limit of detection of S

mode was better than that of A

mode

whose LOD was 0.06%RH. It can be concluded that Lamb wave resonator designed in the paper can be utilized as the high precision detection such as trace moisture detection.

关键词

Keywords

references

TAI H L, ZHEN Y, LIU CH H, et al.. Facile development of high performance QCM humidity sensor based on protonated polyethylenimine-graphene oxide nanocomposite thin film[J]. Sensors and Actuators B:Chemical, 2016, 230:501-509.

XUAN W P, HE M, MENG N, et al.. Fast response and high sensitivity ZnO/glass surface acoustic wave humidity sensors using graphene oxide sensing layer[J]. Scientific Reports, 2014, 4:7206.

MIREA T, YANTCHEV V. Influence of liquid properties on the performance of S 0 -mode Lamb wave sensors:a theoretical analysis[J]. Sensors and Actuators B:Chemical, 2015, 208:212-219.

周剑, 吴学忠, 肖定邦, 等.柔性声表面波器件的波模式分析[J].光学精密工程, 2016, 24(6):1328-1334.

ZHOU J, WU X ZH, XIAO D B, et al.. Analysis on wave mode of flexible surface acoustic wave devices[J]. Opt. Precision Eng., 2016, 24(6):1328-1334. (in Chinese)

MIREA T, YANTCHEV V, OLIVARES J, et al.. Influence of liquid properties on the performance of S 0 -mode Lamb wave sensors Ⅱ:experimental validation[J]. Sensors and Actuators B:Chemical, 2016, 229:331-337.

LU Y P, TANG H Y, FUNG S, et al.. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics[J]. Applied Physics Letters, 2015, 106(26):263503.

PEREZ-CAMPOS A, IRIARTE G F, HERNANDO-GARCIA J, et al.. Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantilevers[J]. Journal of Micromechanics and Microengineering, 2015, 25(2):025003.

孔慧, 李传宇, 周连群, 等.薄膜谐振lamb波传感器测量液体流速矢量的方法[J].光学精密工程, 2017, 25(1):155-162.

KONG H, LI CH Y, ZHOU L Q, et al.. A method for fluid velocity vector measurement using thin film Lamb wave resonator[J]. Opt. Precision Eng., 2017, 25(1):155-162. (in Chinese)

GRATE J W, WENZEL S W, WHITE R M. Flexural plate wave devices for chemical analysis[J]. Analytical Chemistry, 1991, 63(15):1552-1561.

MU X J, KROPELNICKI P, WANG Y, et al.. Dual mode acoustic wave sensor for precise pressure reading[J]. Applied Physics Letters, 2014, 105(11):113507.

WANG T, MU X J, KROPELNICKI P, et al.. Viscosity and density decoupling method using a higher order Lamb wave sensor[J]. Journal of Micromechanics and Microengineering, 2014, 24(7):075002.

HUANG I Y, LEE M C, HSU C H, et al.. Development of a flexural plate-wave (FPW) immunoglobulin-E (IgE) allergy bio-sensing microsystem[J]. Sensors and Actuators B:Chemical, 2012, 162(1):184-193.

LAN J W, HUANG I Y, LIN Y CH, et al.. Development of an FPW biosensor with low insertion loss and high fabrication yield for detection of carcinoembryonic antigen[J]. Sensors (Basel), 2016, 16(11):1729.

ZHOU L Q, MANCEAU J F, BASTIEN F. Influence of gases on Lamb waves propagations in resonator[J]. Applied Physics Letters, 2009, 95(22):223505.

ZAITSEV B D, JOSHI S G. Reflection of ultrasonic Lamb waves produced by thin conducting strips[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999, 46(6):1539-1544.

LIU J S, OMORI T, AHN C J, et al.. Impact of surface periodic grating on film bulk acoustic resonator structures to spurious transverse resonances[J]. Journal of Applied Physics, 2013, 113(14):144507.

LIN CH Y, HUANG I Y, LAN J W. Improvement of insertion loss and quality factor of flexural plate-wave-based alpha-fetoprotein biosensor using groove-type reflective grating structures[J]. Journal of Micro/Nanolithography, Microfabrication, and Microsystems, 2013, 12(1):013017.

凌明祥, 刘谦, 曹军义, 等.压电位移放大机构的力学解析模型及有限元分析[J].光学精密工程, 2016, 24(4):812-818.

LING M X, LIU Q, CAO J Y, et al.. Analytical model and finite element analysis of piezoelectric displacement amplification mechanism[J]. Opt. Precision Eng., 2016, 24(4):812-818. (in Chinese)

CHEN W P, ZHAO ZH G, LIU X W, et al.. A capacitive humidity sensor based on multi-wall carbon nanotubes (MWCNTs)[J]. Sensors (Basel), 2009, 9(9):7431-7444.

浏览量

444

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

多模态原子力显微镜的空气压膜阻尼效应

高真空环境下硅微机械陀螺品质因数的温度特性

真空封装硅微陀螺品质因数的标定

独特谐振模式下薄膜体声波谐振器的设计