X光光刻工艺微针阵列的制备、测试和仿真

李以贵; 吴文渊; 王欢; 蔡金东; 吕曈

doi:10.3788/OPE.20182605.1156

您当前的位置：

首页 >

文章列表页 >

X光光刻工艺微针阵列的制备、测试和仿真

微纳技术与精密机械 | 更新时间：2020-08-13

- X光光刻工艺微针阵列的制备、测试和仿真
- Fabrication, testing and simulation of microneedle array based on X-ray lithography
- 光学精密工程 2018年26卷第5期页码：1156-1164
- 作者机构：
  
  1.上海应用技术大学理学院, 上海 201418
  2.上海应用技术大学机械工程学院, 上海 201418
- 作者简介：
  
  [ "李以贵(1965-), 男, 江西广昌人, 博士, 教授, 博士生导师, 1985年、1991年于哈尔滨工业大学分别获学士、硕士学位, 2000年于日本东北大学获得博士学位, 主要从事微光机电系统(MEMS)方面的研究。E-mail:ygli@sit.edu.cn" ]
  [ "吴文渊(1994-), 男, 安徽安庆人, 硕士研究生, 2017年于安庆师范大学获得学士学位, 主要从事微光机电系统、MEMS微针方面的研究。E-mail:176181102@mail.sit.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(51035005);上海应用技术大学光电传感检测系统协同创新平台资助项目(10210Q172019);上海市联盟计划项目(LM201712)
- DOI：10.3788/OPE.20182605.1156
  中图分类号： TN205;TN305.7
- 收稿日期：2017-11-27，
  
  录用日期：2018-1-10，
  
  纸质出版日期：2018-05-25
- 稿件说明：
移动端阅览
李以贵, 吴文渊, 王欢, 等. X光光刻工艺微针阵列的制备、测试和仿真[J]. 光学精密工程, 2018,26(5):1156-1164.

Yi-gui LI, Wen-yuan WU, Huan WANG, et al. Fabrication, testing and simulation of microneedle array based on X-ray lithography[J]. Optics and precision engineering, 2018, 26(5): 1156-1164.
李以贵, 吴文渊, 王欢, 等. X光光刻工艺微针阵列的制备、测试和仿真[J]. 光学精密工程, 2018,26(5):1156-1164. DOI： 10.3788/OPE.20182605.1156.

Yi-gui LI, Wen-yuan WU, Huan WANG, et al. Fabrication, testing and simulation of microneedle array based on X-ray lithography[J]. Optics and precision engineering, 2018, 26(5): 1156-1164. DOI： 10.3788/OPE.20182605.1156.

摘要

为了提高透皮给药的效率，降低传统注射对人体的疼痛感，需要制备微针阵列结构。本文介绍了一种新的微针阵列结构的制造技术。利用日本立命馆大学的同步辐射光源AURORA进行两次X光移动光刻和一次固定X光光刻技术，在PMMA光刻胶上得到微针阵列。通过采用不同的掩膜版图形以及对不同位置的空心孔进行X光光刻，获得了不同规格的空心微针阵列，针对固定X光光刻时对准的问题，自行研制了X光光刻对准装置，实验结果证明，该装置能实现空心微针阵列的制备。并且进行了微针刺穿测试，结果证明微针有足够的强度。为了达到低成本批量复制微针阵列的目的，还进行了微针模具的倒模和复制实验，成功得到金属镍实心微针阵列。最后，针对光刻过程中微针阵列结构的侧面形状发生畸变的情况，对移动X光光刻建立了仿真预测，将仿真预测结果与实验结果进行了比较，结果表明显影深度的误差为5%。

Abstract

In order to improve the efficiency of transdermal drug dilivery and reduce the pain of traditional injection on the human body

the microneedle array is needed. In this paper

the fabrication technique for microneedle array was introduced. A microneedle array was obtained on a polymethylmethacrylate (PMMA) substrate by using two moving X-ray lithography and alignment X-ray exposure process using the synchrotron radiation source AURORA of Japanese Ritsumeikan University. A hollow microneedle array was fabricated. The different specifications had been successfully fabricated by using different mask pattern and X-ray lithography for different hollow positions. X-ray lithography alignment device had been developed for the problem of alignment during fixed X-ray lithography. The experimental results show that the device could achieve the preparation of hollow microneedle array. Then

the piercing text was carried out

and the results showed that the microneedle had enough strength. Besides

in order to achieve the goal of low cost batch replication of microneedle array

the reverse mold and replication experiments of microneedle array were also carried out

and the Ni solid microneedle array was successfully manufactured. Finally

in view of the distortion of the side shape of the microneedle array structure during the process of X-ray lithography

the simulation prediction was established for the moving X-ray lithography

the simulation prediction results were compared with the experimental results. The results showed that the simulation error of developing depth was 5%.

关键词

Keywords

references

朱凤, 金凡茂, 赵昱, 等.微针经皮给药技术研究进展[J].中国生化药物杂志, 2016, 36(8):149-152.

ZHU F, JIN F M, ZHAO Y, et al .. Research progress in transdermal deliver technology of micro needle[J] . Chinese Journal of Biochemical Pharmaceutics , 2016, 36(8):149-152. (in Chinese)

张朵朵, 吴艳丽, 鞠大宏, 等.微针在经皮给药领域中的应用研究进展[J].中华中医药杂志, 2014, 29(8):2559-2562.

ZHANG D D, WU Y L, JU D H, et al .. Progress on micro needles transdermal drug delivery[J]. China Journal of Traditional Chinese Medicine and Pharmacy , 2014, 29(8):2559-2562. (in Chinese)

陈磊, 桂双英.微针在经皮给药系统的应用研究[J].安徽医药, 2014, 18(3):407-411.

CHEN L, GUI SH Y. Application of microneedles in transdermal drug delivery[J]. Anhui Medical and Pharmaceutical Journal , 2014, 18(3):407-411. (in Chinese)

陈娟, 陈志鹏, 瞿敏明, 等.微针技术在经皮给药中的应用[J].国际药学研究杂志, 2011, 38(2):142-147.

CHEN J, CHEN ZH P, QU M M, et al .. Application of microneedles in transdermal drug delivery[J]. Journal of International Pharmaceutical Research , 2011, 38(2):142-147. (in Chinese)

HONG X Y, WU Z ZH, CHEN L ZH, et al .. Hydrogel microneedle arrays for transdermal drug delivery[J]. Nano-Micro Letters , 2014, 6(3):191-199.

LEE J W, PARK J H, PRAUSNITZ M R. Dissolving microneedles for transdermal drug delivery[J]. Biomaterials , 2008, 29(13):2113-2124.

DAUGIMONT L, BARON N, VANDERMEULEN G, et al .. Hollow microneedle arrays for intradermal drug delivery and DNA electroporation[J]. The Journal of Membrane Biology , 2010, 236(1):117-125.

张华坤, 高思田, 卢明臻, 等.双探针原子力显微镜视觉对准系统[J].光学精密工程, 2014, 22(9):2399-2406.

ZHANG H K, GAO S T, LU M ZH, et al .. Vision alignment system for AFM with dual probes[J]. Opt. Precision Eng ., 2014, 22(9):2399-2406. (in Chinese)

曹玉田, 朱军, 曹莹, 等. MEMS微针的最新研究进展[J].微纳电子技术, 2011, 48(9):577-582.

CAO Y T, ZHU J, CAO Y, et al .. Latest research progress of MEMS microneedles[J]. Micronanoelectronic Technology , 2011, 48(9):577-582. (in Chinese)

GUPTA J, DENSON D D, FELNER E I, et al .. Rapid local anesthesia in humans using minimally invasive microneedles[J]. The Clinical Journal of Pain , 2012, 28(2):129-135.

KIM Y CH, PARK J H, PRAUSNITZ M R. Microneedles for drug and vaccine delivery[J]. Advanced Drug Delivery Reviews , 2012, 64(14):1547-1568.

ZHOU C P, LIU Y L, WANG H L, et al .. Transdermal delivery of insulin using microneedle rollers in vivo[J]. International Journal of Pharmaceutics , 2010, 392(1-2):127-133.

KIM Y CH, PARK J H, PRAUSNITZ M R. Microneedles for drug and vaccine delivery[J]. Advanced Drug Delivery Reviews , 2012, 64(14):1547-1568.

梁静秋, 姚劲松. LIGA技术基础研究[J].光学精密工程, 2000, 8(1):38-41.

LIANG J Q, YAO J S. The study of LIGA technology[J]. Opt. Precision Eng ., 2000, 8(1):38-41. (in Chinese)

杜立群, 鲍其雷, 赵明, 等.在金属基底上制作高深宽比金属微光栅的方法[J].光学精密工程, 2015, 23(3):700-707.

DU L Q, BAO Q L, ZHAO M, et al .. Fabrication of metal micro-grating with high aspect ratio on metal substrate[J]. Opt. Precision Eng ., 2015, 23(3):700-707. (in Chinese)

周织建, 聂伟荣, 席占稳, 等.多层UV-LIGA电铸镍材料的抗冲击性能[J].光学精密工程, 2015, 23(4):1044-1052.

ZHOU ZH J, NIE W R, XI ZH W, et al .. Anti-impact material properties of UV-LIGA multi-layered electroformed nickel[J]. Opt. Precision Eng ., 2015, 23(4):1044-1052. (in Chinese)

WU Y T, LIAO J D, WENG C C, et al .. Alkanethiolate self-assembled monolayers as a negative or positive resist for electron lithography[J]. The Journal of Physical Chemistry C , 2009, 113(11):4543-4548.

KHUMPUANG S, RUTHER P, PAUL O. Micromolding methods for hollow microneedle arrays using megasonically enhanced casting[C]. Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE , 2009: 200-203.

胡洋洋, 朱荻, 李寒松.采用过电铸工艺制造金属微细阵列网板[J].光学精密工程, 2010, 18(8):1793-1800.

HU Y Y, ZHU D, LI H S. Fabrication of metal micro hole array by using over-plating technology[J]. Opt. Precision Eng ., 2010, 18(8):1793-1800. (in Chinese)

浏览量

371

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据