用于位相缺陷检测的反射式剪切点衍射干涉仪

马云; 刘一鸣; 朱文华

doi:10.3788/OPE.20182612.2873

您当前的位置：

首页 >

文章列表页 >

用于位相缺陷检测的反射式剪切点衍射干涉仪

现代应用光学 | 更新时间：2020-07-05

- 用于位相缺陷检测的反射式剪切点衍射干涉仪
- Reflective shearing point diffraction interferometer for phase defect measurement
- 光学精密工程 2018年26卷第12期页码：2873-2880
- 作者机构：
  
  1.南京理工大学先进发射协同创新中心, 江苏南京 210094
  2.南京理工大学电子工程与光电技术学院, 江苏南京 210094
- 作者简介：
  
  [ "马云(1994-), 女, 江苏泰州人, 硕士研究生, 主要从事光干涉测量方面的研究。E-mail:mayun@njust.edu.cn" ]
- 基金信息：
  
  国家重点研发计划资助项目(2017YFF0107103)
- DOI：10.3788/OPE.20182612.2873
  中图分类号： O436.1;TH744.3
- 收稿日期：2018-06-28，
  
  录用日期：2018-8-21，
  
  纸质出版日期：2018-12-25
- 稿件说明：
移动端阅览
马云, 刘一鸣, 朱文华. 用于位相缺陷检测的反射式剪切点衍射干涉仪[J]. 光学精密工程, 2018,26(12):2873-2880.

Yun MA, Yi-ming LIU, Wen-hua ZHU. Reflective shearing point diffraction interferometer for phase defect measurement[J]. Optics and precision engineering, 2018, 26(12): 2873-2880.
马云, 刘一鸣, 朱文华. 用于位相缺陷检测的反射式剪切点衍射干涉仪[J]. 光学精密工程, 2018,26(12):2873-2880. DOI： 10.3788/OPE.20182612.2873.

Yun MA, Yi-ming LIU, Wen-hua ZHU. Reflective shearing point diffraction interferometer for phase defect measurement[J]. Optics and precision engineering, 2018, 26(12): 2873-2880. DOI： 10.3788/OPE.20182612.2873.

摘要

为了实现光学元件位相缺陷的大视场、高分辨率、瞬态检测，设计了一种基于无镜成像算法的反射式剪切点衍射干涉仪。该干涉仪通过在参考光与测试光之间引入横向错位量，形成高密度线性载频，利用快速傅里叶变换算法从单幅干涉图中提取待测波面信息，实现缺陷的瞬态测量。利用无镜成像算法抑制了缺陷的衍射效应，总结了有效的缺陷类型辨别方法。实验检测了强激光系统中的一块光学平晶，验证了所提缺陷类型判据的正确性。此外，采用反射式剪切点衍射干涉仪对一块激光毁伤的光学平板进行检测，测试结果与Veeco NT9100白光干涉仪测量结果相比，相对误差为2.1%。结果表明，该干涉仪能够有效应用于检测大口径光学元件的位相缺陷。

Abstract

In order to realize a large field

high resolution

and dynamic measurement of phase defects of optical components

a Reflective Shearing Point Diffraction Interferometer (RSPDI) was proposed. A lateral shear amount was introduced between the test and reference light to generate a high-density linear carrier frequency

and the information of the wavefront under the test was extracted from a single interferogram by an fast Fourier transform algorithm to determine the simultaneous measurement of the defects. The lensless imaging algorithm suppressed the diffraction effect of the defect

and the effective discrimination method of the defect type was summarized. In the experiment

an optical flat in a high-power laser system was detected by the RSPDI

and the correctness of the defect type criterion was verified. In addition

a laser-damaged optical plate was measured by the RSPDI and a Veeco NT9100 white light interferometer

with a relative error of 2.1%. The results indicate that the interferometer can be used to detect phase defects of large-aperture optical components effectively.

关键词

Keywords

references

ARIMA K, SHIGETOSHI T, INOUE H, et al ..Nano-scale characterization of surface defects on CMP-finished Si wafers by scanning probe microscopy combined with laser light scattering[C]. Proc.MRS , 2007, 991: 227-232. https: //www.researchgate.net/publication/272448051_Nano-scale_Characterization_of_Surface_Defects_on_CMP-finished_Si_Wafers_by_Scanning_Probe_Microscopy_Combined_with_Laser_Light_Scattering

董明利, 李波, 张帆, 等.基于光学傅里叶变换的周期性微结构缺陷检测[J].光学精密工程, 2017, 25(7):1727-1737.

DONG M L, LI B, ZHANG F, et al..Detection of periodic microstructure defect based on optical Fourier transform[J].Opt.Precision Eng., 2017, 25(7):1727-1737.(in Chinese)

刘洋, 徐文东, 赵成强, 等.基于激光光散射层貌术的蓝宝石内部缺陷检测系统[J].中国激光, 2014, 41(9):38-42.

LIU Y, XU W D, ZHAO CH Q, et al..A detecting system of sapphire internal defects based on laser light scattering tomography[J].Chinese Journal of Lasers, 2014, 41(9):38-42.(in Chinese)

李艳红, 赵跃进, 冯立春, 等.基于脉冲位相的红外热波无损检测法测量缺陷深度[J].光学精密工程, 2008, 16(1):55-58.

LI Y H, ZHAO Y J, FENG L CH, et al..Measurement of defect depth by infrared thermal wave nondestructive evaluation based on pulsed phase[J]. Opt.Precision Eng., 2008, 16(1):55-58.(in Chinese)

罗茂, 步扬, 徐静浩, 等.基于多光谱技术的光学元件表面疵病检测[J].中国激光, 2017, 9(1):198-207.

LUO M, BU Y.XU J, et al..Optical element surface defect measurement based on multispectral technique[J].Chinese Journal of Lasers, 2017, 9(1):198-207.(in Chinese)

MATTHEWS M J, BASS I L, GUSS G M, et al..Downstream intensification effects associated with CO 2 laser mitigation of fused silica[J]. SPIE, 2007, 6720:67200A.

BERCEGOL H, BOUCHUT P R, LAMAIGNERE L, et al..The impact of laser damage on the lifetime of optical components in fusion lasers[J].SPIE, 2004, 5273:312-324.

YAMANE T, TANAKA T, TERASAWA T, et al..Phase defect analysis with actinic full-field EUVL mask blank inspection[J].SPIE, 2011, 8166, 81660G.

OGAWA K, WATAKABE Y.Phase defect inspection by differential interference[J]. SPIE, 2001, 4409:543-554.

吕宪魁, 陶纯匡.透明材料位相缺陷的检测[J].无损检测, 2004, 26(11):552-553.

LV X K, TAO CH K.Phase disfigurement for transparent material[J].Nondestructive Testing, 2004, 26(11):552-553.(in Chinese)

HAMAMOTO K, TANAKA Y, HOSOKAWA N, et al..Phase defect observation using an EUV microscope[J].SPIE, 2006, 6151:361-367.

RAVIZZA F L. Imaging of Phase Objects Using Partially Coherent Illumination [D].Livermore: Lawrence Livermore National Laboratory (LLNL), 2013.

SOMMARGREN G E, PHILLION D W, JOHNSON M A, et al..100-picometer interferometry for EUVL[J].SPIE, 2002, 4688:316-328.

李瑶, 杨甬英, 王晨, 等.点衍射干涉检测技术[J].中国光学, 2017, 10(4):391-414.

LI Y, YANG Y Y, WANG CH, et al..Point diffraction interference detection technology[J].Chinese Optics, 2017, 10(4):391-414.(in Chinese)

SERVIN M, QUIROGA J A, PADILLA J M. Fringe Pattern Analysis for Optical Metrology: Theory, Algorithms, and Applications [M].Wiley-VCH, 2014: 164-169.

古德曼.傅里叶光学导论[M].秦克诚, 译.北京: 电子工业出版社, 2011: 40-43.

GOODMAN J W. Introduction to Fourier Optics [M].QIN K CH, Transl..Beijing: Publishing House of Electronics Industry, 2011: 40-43.(in Chinese)

MACY W W.Two-dimensional fringe-pattern analysis[J].Applied Optics, 1983:3898-3901.

浏览量

261

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

Tsallis相对熵引导的包裹相位修补

基于空洞空间卷积网络的点衍射干涉图像相位解包技术

混频对全视场外差动态干涉仪测量精度的影响

通过傅里叶变换测量多表面面形

半导体双波长透射式红外干涉仪的研制及应用