聚酰亚胺薄膜的反应离子刻蚀抛光

杨正; 靳志伟; 陈建军; 饶先花; 尹韶云; 吴鹏

doi:10.3788/OPE.20192702.0302

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聚酰亚胺薄膜的反应离子刻蚀抛光

现代应用光学 | 更新时间：2020-08-13

- 聚酰亚胺薄膜的反应离子刻蚀抛光
- Polishing method for polyimide membranes based on reactive ion etching
- 光学精密工程 2019年27卷第2期页码：302-308
- 作者机构：
  
  1.中国科学院重庆绿色智能技术研究院，重庆 400714
  2.跨尺度制造技术重庆市重点实验室，重庆 400714
- 作者简介：
  
  [ "杨正(1988-)，男，重庆垫江人，硕士，助理研究员，2010年、2013年于四川大学分别获得学士、硕士学位，主要从事微光学元件的设计与加工。E-mail:cqyangking@cigit.ac.cn" ]
  吴鹏(1982-)，男，湖北武汉人，博士，副研究员，2002年、2010年于华中科技大学分别获得学士、博士学位，主要从事微纳制造、轻量化光学系统、光学设计像差理论和光纤传感的研究，E-mail: wupeng@cigit.ac.cn WU Peng, E-mail: wupeng@cigit.ac.cn
- 基金信息：
  
  国家自然科学青年基金资助项目(61605208)
- DOI：10.3788/OPE.20192702.0302
  中图分类号： TQ323.7;TN05
- 收稿日期：2018-07-02，
  
  录用日期：2018-9-1，
  
  纸质出版日期：2019-02-15
- 稿件说明：
移动端阅览
杨正, 靳志伟, 陈建军, 等. 聚酰亚胺薄膜的反应离子刻蚀抛光[J]. 光学精密工程, 2019,27(2):302-308.

Zheng YANG, Zhi-wei JIN, Jian-jun CHEN, et al. Polishing method for polyimide membranes based on reactive ion etching[J]. Optics and precision engineering, 2019, 27(2): 302-308.
杨正, 靳志伟, 陈建军, 等. 聚酰亚胺薄膜的反应离子刻蚀抛光[J]. 光学精密工程, 2019,27(2):302-308. DOI： 10.3788/OPE.20192702.0302.

Zheng YANG, Zhi-wei JIN, Jian-jun CHEN, et al. Polishing method for polyimide membranes based on reactive ion etching[J]. Optics and precision engineering, 2019, 27(2): 302-308. DOI： 10.3788/OPE.20192702.0302.

摘要

为进一步提高聚酰亚胺薄膜光学器件的表面质量，提出了一种聚酰亚胺薄膜的反应离子刻蚀抛光方法，对其抛光原理和抛光实验进行了研究。利用光刻胶流体的低表面张力及流动特性，通过在聚酰亚胺薄膜表面涂覆光刻胶对其表面缺陷进行填补；结合聚酰亚胺与光刻胶的反应离子高各向异性等比刻蚀工艺，将光刻胶光滑平整表面高保真刻蚀转移至聚酰亚胺表面，从而实现聚酰亚胺薄膜的反应离子刻蚀抛光。实验结果表明：PV、RMS分别为1.347 μm和340 nm的粗糙表面，通过二次抛光其粗糙度可降低至75 nm和13 nm；PV、RMS分别为61 nm和8 nm的表面，其粗糙度可降低至9 nm和1 nm。该抛光方法能有效提高聚酰亚胺薄膜的表面光洁度，可为以聚酰亚胺薄膜为代表的高分子柔性光学器件的精密加工提供新的工艺思路。

Abstract

To improve the surface quality of polyimide (PI) optics

a polishing method for polyimide membranes based on Reactive Ion Etching (RIE) was proposed. The working principle and experimental research for the proposed method were discussed in this study. Owing to the low surface tension and mobility of the PR fluid

surface defects on the PI surface were required to be filled by a PR coating. In addition

owing to the highly anisotropic and identical RIE rates for PR and PI

the smooth PR surface could be precisely transferred onto the PI surface. The polishing of PI membranes then was realized. Experimental results indicate that for a surface roughness with PV of 1.347 μm and RMS of 340 nm

the respective values can be reduced to 75 nm and 13 nm after double polishing. Furthermore

for a surface roughness with PV of 61 nm and RMS of 8 nm

the values can be reduced to 9 nm and 1 nm

respectively. Hence

the proposed polishing method based on RIE can efficiently improve the surface finish of PI membranes

which in turn can provide novel schemes for precision manufacturing of PI-based flexible polymer devices.

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references

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