双角度编码器超精密转台测角误差校准

焦扬; 黄明; 李梦阳; 秦代成

doi:10.3788/OPE.20192710.2180

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双角度编码器超精密转台测角误差校准

更新时间：2020-08-13

- 双角度编码器超精密转台测角误差校准
- Calibration of angular errors of high-precision rotary table with two-angle encoders
- 光学精密工程 2019年27卷第10期页码：2180-2191
- 作者机构：
  
  1.上海交通大学机械与动力工程学院，上海 200240
  2.中国工程物理研究院机械制造工艺研究所，四川绵阳 621900
- 作者简介：
  
  [ "焦扬(1991-)，男，山西大同人，博士研究生，主要从事精密计量装备及检测技术的研究。E-mail：yangjsj@sjtu.edu.cn" ]
- 基金信息：
  
  国家科学挑战计划资助项目(No.JCKY2016212A506-0105);中国工程物理研究院超精密加工技术实验室重点基金项目(No.K1065);高档数控机床与基础制造装备科技重大专项(No.2016ZX04002007-002)
- DOI：10.3788/OPE.20192710.2180
  中图分类号： TB922;TH712
- 收稿日期：2019-04-28，
  
  录用日期：2019-5-21，
  
  纸质出版日期：2019-10-25
- 稿件说明：
移动端阅览
焦扬, 黄明, 李梦阳, 等. 双角度编码器超精密转台测角误差校准[J]. 光学精密工程, 2019,27(10):2180-2191.

Yang JIAO, Ming HUANG, Meng-yang LI, et al. Calibration of angular errors of high-precision rotary table with two-angle encoders[J]. Optics and precision engineering, 2019, 27(10): 2180-2191.
焦扬, 黄明, 李梦阳, 等. 双角度编码器超精密转台测角误差校准[J]. 光学精密工程, 2019,27(10):2180-2191. DOI： 10.3788/OPE.20192710.2180.

Yang JIAO, Ming HUANG, Meng-yang LI, et al. Calibration of angular errors of high-precision rotary table with two-angle encoders[J]. Optics and precision engineering, 2019, 27(10): 2180-2191. DOI： 10.3788/OPE.20192710.2180.

摘要

为了提高超精密角度计量转台的测量精度，对转台所用编码器分度误差与细分误差的校准展开研究。首先，介绍了转台的结构，设计了方便进行相互比对的双角度编码器测角系统并描述了其多读数头布置方式。然后，基于直接比较法与自校准法进行了双编码器分度误差的快速、高精度校准。最后，借助精密电容式位移传感器测量系统，利用比较法检测了两套编码器各读数头的单信号周期测量误差。校准结果显示：采用双读数头均布的第一套编码器的分度误差为±0.27″，细分误差在±0.1″以内；基于四读数头均布方式进行测量的第二套编码器分度误差为±0.17″，细分误差在±0.2″以内；两套编码器的测量精度皆为亚角秒级。双编码器相互比对的校准方式有助于对转台的测角误差进行全面、准确地评估。

Abstract

To improve the accuracy of a high precision angle measuring table

calibrations of angle encoders of the rotary table to determine both graduation and interpolation errors were performed. First

the structure of the rotary table was introduced

including the angular measuring system with two angle encoders and the arrangements of the scanning heads. Then

graduation errors of the two encoders were calibrated using the direct comparison and self-calibration methods. Finally

with the aid of capacitive displacement sensors

the position error within one signal period (i.e.

the interpolation error) for each scanning head of the encoders was investigated using the direct comparison method. Calibration results indicate that for the first angle encoder with two scanning heads arranged at intervals of 180°

the graduation and interpolation errors are within ±0.27 and approximately ±0.1 arcsec

respectively. For the second encoder

which uses an average value of four heads arrange at intervals of 90° as the measurement value

the graduation and interpolation errors are within ±0.17 and approximately ±0.2 arcsec

respectively. Both angle encoders have a measuring accuracy at a sub-arcsec level. The manner in which the two angle encoders calibrate each other is helpful for complete and accurate determination of the rotary table's angular errors.

关键词

Keywords

references

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