基于概率统计的BK7玻璃磨削亚表层损伤深度在线预测技术

吕东喜; 陈明达; 姚友强; 赵岳; 祝颖丹

doi:10.3788/OPE.20202801.0102

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基于概率统计的BK7玻璃磨削亚表层损伤深度在线预测技术

微纳技术与精密机械 | 更新时间：2020-08-13

- 基于概率统计的BK7玻璃磨削亚表层损伤深度在线预测技术
- Prediction of subsurface damage depth in grinding of BK7 glass based on probability statistics
- 光学精密工程 2020年28卷第1期页码：102-109
- 作者机构：
  
  1.中国科学院宁波材料技术与工程研究所浙江省机器人与智能制造装备技术重点实验室，浙江宁波 315201
  2.中国科学院大学材料与光电研究中心，北京 100049
- 作者简介：
  
  [ "吕东喜(1983-)，男，河北沧州人，助理研究员，2009年、2014年于哈尔滨工业大学分别获得硕士、博士学位，主要从事旋转超声加工及磨削技术与工艺等方面的研究。E-mail:dongxi_lv@yahoo.com" ]
  [ "陈明达(1972-)，男，浙江宁波人，高级工程师，1995年于兰州铁道学院获得学士学位，主要从事复合材料智能化制造技术与装备等方面的研究。E-mail: chenmingda@nimte.ac.cn" ]
  [ "祝颖丹(1977-)，女，湖北咸宁人，研究员，博士生导师，1999年、2002年、2005年于武汉理工大学分别获得学士、硕士、博士学位，现为中国科学院宁波材料技术与工程研究所复合材料智能制造与装备团队负责人，主要从事复合材料机械加工工艺、复合材料智能制造与装备等方面的研究。E-mail:y.zhu@nimte.ac.cn" ]
- 基金信息：
  
  浙江省自然科学基金资助项目(LY18E050028);中科院战略性先导专项A(XDA-Y04-02-01);宁波市国际合作项目(2017D10025);宁波市自然科学基金资助项目(2018A610173);宁波市工业重大专项(2017B10007)
- DOI：10.3788/OPE.20202801.0102
  中图分类号： TG663
- 收稿日期：2019-08-29，
  
  录用日期：2019-10-17，
  
  纸质出版日期：2020-01-15
- 稿件说明：
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吕东喜, 陈明达, 姚友强, 等. 基于概率统计的BK7玻璃磨削亚表层损伤深度在线预测技术[J]. 光学精密工程, 2020,28(1):102-109.

Dong-xi LÜ, Ming-da CHEN, You-qiang YAO, et al. Prediction of subsurface damage depth in grinding of BK7 glass based on probability statistics[J]. Optics and precision engineering, 2020, 28(1): 102-109.
吕东喜, 陈明达, 姚友强, 等. 基于概率统计的BK7玻璃磨削亚表层损伤深度在线预测技术[J]. 光学精密工程, 2020,28(1):102-109. DOI： 10.3788/OPE.20202801.0102.

Dong-xi LÜ, Ming-da CHEN, You-qiang YAO, et al. Prediction of subsurface damage depth in grinding of BK7 glass based on probability statistics[J]. Optics and precision engineering, 2020, 28(1): 102-109. DOI： 10.3788/OPE.20202801.0102.

摘要

为了在线预测硬脆材料磨削加工引起的亚表面损伤深度，本文利用概率统计法对磨粒高度进行分析，建立了刀具切削力与亚表层裂纹扩展深度之间的理论关系模型。首先，基于硬脆材料的压痕断裂力学理论，分析了中位裂纹扩展长度与磨粒压痕深度之间的内在关联。随后，对刀具端面边缘的磨粒数目进行了数理统计，建立了刀具切削力与单个磨粒切削深度之间的理论关系。在此基础上，提出了工件亚表层损伤深度的在线预测模型

SSD

max

=1.284×

SSD

theo

max

－36.23

并结合BK7玻璃的实际磨削实验验证了其正确性。通过对比实验结果与理论模型的预测结果发现，该方法可以在线、准确地预测磨削加工引起的工件亚表层损伤深度。

Abstract

In order to predict online the subsurface damage depth of the specimen induced in grinding of hard-brittle material

a theoretical relationship between the cutting force of the diamond tool and the subsurface crack depth of the specimen was established. This relationship was based on the statistical analysis of abrasive height using probability and statistics. First

based on the indentation fracture mechanics of the hard-brittle materials

the intrinsic association between the propagation depth of the median crack and the indentation depth of a single abrasive was investigated. Subsequently

the number of actual abrasives located on the boundary of the tool end-face was calculated using mathematical statistics

and the internal correlation between the cutting force of the tool and the cutting depth of each single abrasive was developed. Finally

a method for quick online prediction of the subsurface damage depth was proposed (

SSD

max

=1.284×

SSD

theo

max

-36.23)

and its accuracy was verified by an actual grinding experiment of BK7 glass. The experimental results illustrate that this technique can achieve accurate online prediction of the depth of subsurface damage involved in the grinding process.

关键词

Keywords

references

朱永伟, 李信路, 王占奎, 等.光学硬脆材料固结磨料研磨中的亚表面损伤预测[J].光学精密工程, 2017, 25(2): 367-374.

ZHU Y W, LI X L, WANG ZH K, et al .. Subsurface damage prediction for optical hard-brittle material in fixed abrasive lapping[J]. Opt. Precision Eng ., 2017, 25(2): 367-374. (in Chinese)

王紫光, 高尚, 朱祥龙, 等.硅片低损伤磨削砂轮及其磨削性能[J].光学精密工程, 2017, 25(10): 2689-2696.

WAGN Z G, GAO S, ZHU X L, et al .. Grinding wheel for low-damage grinding of silicon wafers and its grinding performance[J]. Opt. Precision Eng ., 2017, 25(10): 2689-2696. (in Chinese)

LAMBROPOULOS J. From abrasive size to subsurface damage in grinding[C]. Optical Fabrication and Testing. Optical Society of America, Québec City, Canada: OMA6 , 2000.

MA B, SHEN Z, HE P, et al .. Detection of subsurface defects of fused silica optics by confocal scattering microscopy[J]. Chinese Optics Letters , 2010, 8(3): 296-299.

LAMBROPOULOS J C, JACOBS S D, RUCKMAN J. Material removal mechanisms from grinding to polishing[J]. Ceramic Transactions , 1999, 102: 113-128.

LI S, WANG Z, WU Y. Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes[J]. Materials Processing Technology , 2008, 205(1-3): 34-41.

LV D X, YAN C, CHEN G, et al .. Mechanistic prediction for cutting force in rotary ultrasonic machining of BK7 glass based on probability statistics[J]. Ultrasonics , 2019, doi.org/10.1016/j.ultras.2019.106006.

吕东喜.硬脆材料旋转超声加工高频振动效应的研究[D].哈尔滨: 哈尔滨工业大学, 2014. http://cdmd.cnki.com.cn/Article/CDMD-10213-1014085010.htm

LÜ D X. High Frequency Vibration Effects in Rotary Ultrasonic Machining Hard-Brittle Material [D]. Harbin: Harbin Institute of Technology, 2014. (in Chinese)

WANG J, ZHANG C, FENG P, et al .. A model for prediction of subsurface damage in rotary ultrasonic face milling of optical K9 glass[J]. The International Journal of Advanced Manufacturing Technology , 2016, 83(1-4): 347-355.

HOU Z B, KOMANDURI R. On the mechanics of the grinding process-Part Ⅰ. Stochastic nature of the grinding process[J]. International Journal of Machine Tools & Manufacture , 2003, 43(15): 1579-1593.

MALKLN S, HWANG T W, Grinding mechanisms for ceramics[J]. Annals of the CIRP , 1996, 45(1): 569-580.

吕东喜, 王洪祥, 黄燕华.光学材料磨削的亚表面损伤预测[J].光学精密工程, 2013, 21(3): 680-686.

LV D X, WANG H X, HUANG Y H. Prediction technique of grinding induced subsurface damage of optical materials[J]. Opt. Precision Eng ., 2013, 21(3): 680-686. (in Chinese)

LIU D F, CONG W L, PEI Z J, et al .. A cutting force model for rotary ultrasonic machining of brittle materials[J]. International Journal of Machine Tools and Manufacture , 2012, 52(1): 77-84.

LAWN B, WILSHAW R. Indentation fracture: principles and applications[J]. Journal of Materials Science , 1975, 10(6): 1049-1081.

LV D. Influences of high-frequency vibration on tool wear in rotary ultrasonic machining of glass BK7[J]. The International Journal of Advanced Manufacturing Technology , 2016, 84(5-8): 1443-1455.

张建华.单程平面磨削淬硬层预测及其摩擦磨损性能研究[D].济南: 山东大学, 2008. http://cdmd.cnki.com.cn/article/cdmd-10422-2009042931.htm

ZHANG J H. Study on the Prediction of Grind-Hardened Layer and Its Friction and Wear Performance [D]. Jinan: Shandong University, 2008. (in Chinese)

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