高精度激光光束准直系统设计

朱凡; 李颖先; 谭久彬

doi:10.3788/OPE.20202804.0817

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高精度激光光束准直系统设计

现代应用光学 | 更新时间：2020-08-13

- 高精度激光光束准直系统设计
- Design of high-accuracy laser beam collimation system
- 光学精密工程 2020年28卷第4期页码：817-826
- 作者机构：
  
  哈尔滨工业大学超精密光电仪器工程研究所，黑龙江哈尔滨 150080
- 作者简介：
  
  [ "朱凡 (1986-)，男，湖北随州人，副研究员，2007年、2009年、2013年于哈尔滨工业大学分别获得学士、硕士、博士学位，主要从事光电测量仪器方面的研究。E-mail:zf5016@126.com" ]
  [ "谭久彬 (1955-)，男，黑龙江省阿城人，中国工程院院士，教授，博士生导师，1982年、1987年、1991年于哈尔滨工业大学分别获得学士、硕士、博士学位，现为哈尔滨工业大学超精密光电仪器工程研究所所长，主要从事超精密测量与仪器技术、超精密光机电一体化装备技术、超精密激光测量与探测技术等方面的研究。E-mail: jbtan@hit.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(No.51405107);国家自然科学基金资助项目(No.51775149);黑龙江省博士后科研启动金资助项目(No.LBH-Q17065)
- DOI：10.3788/OPE.20202804.0817
  中图分类号： TH741.14; TP391
- 收稿日期：2019-10-30，
  
  修回日期：2019-12-10，
  
  录用日期：2019-12-10，
  
  纸质出版日期：2020-04-15
- 稿件说明：
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朱凡, 李颖先, 谭久彬. 高精度激光光束准直系统设计[J]. 光学精密工程, 2020,28(4):817-826.

Fan ZHU, Ying-xian LI, Jiu-bin TAN. Design of high-accuracy laser beam collimation system[J]. Optics and precision engineering, 2020, 28(4): 817-826.
朱凡, 李颖先, 谭久彬. 高精度激光光束准直系统设计[J]. 光学精密工程, 2020,28(4):817-826. DOI： 10.3788/OPE.20202804.0817.

Fan ZHU, Ying-xian LI, Jiu-bin TAN. Design of high-accuracy laser beam collimation system[J]. Optics and precision engineering, 2020, 28(4): 817-826. DOI： 10.3788/OPE.20202804.0817.

摘要

为了进一步提高激光光束用作直线基准的精度，建立了基于反射镜平动式光束稳定器以及两点式光束漂移分离法的高精度激光光束准直系统。首先，对系统中基于反射镜平动的光束稳定器进行研究，对其光束偏转原理以及影响因素进行分析，并对两点式光束漂移分离方法进行介绍。然后，对光束偏转单元的分辨力以及偏转范围、所使用的压电陶瓷非线性和迟滞特性、以及光束偏转单元的频率响应特性进行实验测试。最后，对该激光准直系统的激光光束准直精度进行测试。实验结果表明：本文提出的光束偏转单元在120 μrad范围内的光束偏转分辨力可以达到5 nrad，频率响应特性高于2 kHz；最终激光准直系统的准直精度在二维方向上分别达到1.9×10

-8

rad和2.1×10

-8

rad

相对于现有技术约提高了3倍，满足激光光束用作高精度直线基准的需求。

Abstract

To further improve the accuracy of laser-beam linear datum

a high-accuracy laser collimation system based on a high resolution and high frequency response beam stabilizer and a two-point beam drift separation method was established in this study. First

the translation mirror-based beam stabilizer of the system was studied

and its beam deflection principle and influence factor were analyzed in addition with the two-point beam drift separation method. Then

the resolution and deflection ranges of beam stabilizer

the nonlinearity and hysteresis of piezo

and the associated frequency response were tested. Finally

experimental tests were conducted to determine the accuracy of the laser collimation system. Experimental results indicate that a resolution of 5 nrad of the beam stabilizer can be achieved in deflection range of 120 μrad with frequency response higher than 2 kHz. Furthermore

accuracies of 1.9×10

-8

rad and 2.1×10

-8

rad of the laser-beam collimation system in 2D directions are obtained

which are both 3 times higher than those corresponding to existing technology. The investigated system is

therefore

capable of satisfying the high accuracy requirements of linear datum using laser-beam.

关键词

Keywords

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